ABSTRACT
The advantages of
automation, its architecture, and semiconductor production automation. This
article provides a summary that 100-GHz and 100-Gb/s semiconductor active units
are currently available on the market, based on semiconductor characteristics
and device requirements. The state of competing technologies is then presented
in two distinct fields, together with oscillators that demonstrate their
behaviour in analogue circuit applications and frequency dividers that
demonstrate their suitability for high-speed digital circuits. Then a
description of the most widely utilised applied sciences follows.
Keywords : Semiconductor Technologies
,Automation, Basic Properties & Materials Processes, Benefits,
Applications.
Ø
INTRODUCTION :
The technology of
high-performance compound semiconductors is becoming more diverse. GaAs, the
historical business, is continuously scrutinised for both current and future
uses. Due to the gradual shift in the economics of semiconductor manufacturing
brought about by the rise in capitalization costs of semiconductor fabrication
facilities, few manufacturers can afford to increase products for specialised
niche markets, such as radiation-hardened devices. The production of semiconductors is sometimes regarded as the
most difficult and complicated process, involving significant financial
investment and cutting-edge technology. In the daily operations of producing
semiconductors, automation plays an increasingly important role. Similar to
other industries, automation in semiconductor production began with the
replacement of human operators for tasks that required repetitive, risky, or
dangerous actions.
Ø
METHODOLOGY :
Automation in semiconductor
production should speed up the processes involved in fabricating
semiconductors, which involve depositing layers of materials on substrates,
doping them with impurities, and patterning them with photolithography to
create integrated circuits. It is possible to quickly integrate semiconductor
company automation into existing manufacturing facilities because to the
hierarchical desktop manipulation structure utilised in this industry. The
lower levels of the hierarchy in the design cover embedded controllers for
real-time management and assessment of fabrication equipment with sensors
installed for in-situ monitoring and characterization. At the upper level,
handling, scheduling, and execution of progressively complex, context-dependent
procedures, metrology operations, or fabric movements occur. A quicker, shorter
cycle time process is needed for a variety of semiconductor production
techniques.
Modern semiconductor
production increasingly uses cluster tools, each of which comprises of several
single-wafer processing chambers, due to development, greater yield, and less
contamination. We demonstrate the operation of automation in semiconductor
fabrication tools using a PDV (Physical Vapour Deposition) cluster device.
Reduced costs, improved
fab performance, reliability, and product quality are all benefits of fab
automation.
Fundamentally, fab
automation must separate fab activities, which are groups or successions of the
aforementioned jobs:
1. Locating and going the
lot decision to determine which lot to system
2. Process requirements
are established by a recipe and setting of
circumstances.
3. Launch the system to
begin the procedure.
4. File and file dimension
information are gathered using the facts-gathering approach during processing.
5. To select the
acceptability of the processing result, utilise go/no-go fine gating.
6. Use exception handling
to manage and resolve manufacturing exceptions
7. Controlling alarms to
respond to set alarms.
Ø Properties of semiconductor material
The characteristics of the constituent semiconductor materials and
the device structure have the most effects on the performance of electronic
devices that operate at very high frequencies ..Si, GaAs, and InP are now the
favoured materials for devices with cut-off frequencies of 300 GHz and above.
The energy gap, carrier transport properties, and thermal conductivity are only
a few of the important qualities that are included in the table below. The
features of the In GaAs lattice that combines InP, GaN, and InAs are also
discussed.
Large enough band holes
are effective because they have strong breakdown qualities. In reality,
voltages on the order of a few volts over a hundred nm are no match for Si,
GaAs, and InP. Additionally, p-n junctions have a well-defined rectifying
conduct with very minimal leakage current at room temperature. GaN enables even
higher breakdown voltages, whereas InAs’s tiny power hole limits its
application to very low voltage devices. The science of high-performance
compound semiconductors is becoming more and more diverse. GaAs, the
long-standing industry pillar, is continually scrutinised for both current and
upcoming product applications. Thanks to advances in wide bandgap semiconductor
technologies, there are now opportunities for electric vehicles.In terms of
switching losses and on-resistance, GaN and SiC technologies are more efficient
than standard Si units. This will enable engineers to increase switching
frequency while also enhancing motor pressure effectiveness.
Ø Manufacturing
Financial reasons are
a barrier to the use of wide-bandgap applied sciences in automobile motor
drives since Sic science is incompatible with widely used manufacturing tools.
The heteroepitaxy technology, which is manufactured using modern production
equipment, is used in industrial GaN switches. With the recent availability of
less priced GaN-on-Si switches for industrial devices, wide-band gap research
has advanced significantly.
Ø Voltage Limitations
GaN-on-Si is an affordable
switching solution with good efficiency for low-voltage applications. However,
these switches are not commercially available at voltages above 650 V at this
time. On the other hand, SiC MOSFETs are available at medium voltage levels
(1,200 V and higher).
Ø Efficiency of semiconductor technologies
Naturally, a highly
efficient motor drive system will result in a highly efficient product, but it
also lowers the cost of the electric car by removing the restrictions on
battery storage and thermal design. Compared to other technologies, GaN-on-SiC
technologies show greater efficiency and highest switching frequency figures.
These switches are more expensive to produce both SiC and GaN-on-Si, hence they
are not cost-effective for automotive motor drive applications.
Fig. 1 The measured signals
from a low-speed gate driver for SiC MOSFETs.
Ø Thermal Response
At temperatures above 300 °C, wide-bandgap technologies often
exhibit significantly lower intrinsic carrier concentrations than Si, as well
as reduced thermal requirements due to efficiency improvements. SiC is more
heat-conductive than other materials. Due to these factors, the package design
and thermal constraints are both further eased.
Ø Scalability/Internal Diode
Due to the high current needs of automobile motor drives, power
switches must be multiplexed. To maximise the volume of the die and simplify the
internal wire topology, traditional Si power MOSFETs have a vertical
configuration.
Fig. 2 The
on-resistance versus blocking voltage of different tech-neologies.
Ø Benefits To the Semiconductor Industry
This more complete logic memory connectivity (LMC) density measure
[DL, DM, DC] can describe the essential technological properties of
semiconductor technologies, which are becoming more subtle and complex. Even
though companies may still choose to use their preferred labels to market their
products, the LMC density measure can act as a common language to gauge
technological advancements among semiconductor manufacturers for their
customers and other parties to improve straightforward communication. Tech vendors
and researchers may focus on one or more of the LMC metric's components.
Ø CONCLUSION
Attempts to prevent and end fraud in ordinary fab operations led to
the beginning of automation in the semiconductor industry. As semiconductor
technology and the semiconductor industry continue to improve and grow,
manufacturing systems must be developed fast to meet the industry’s changing
technical and commercial requirements. Production of semiconductors has been
hampered by automation islands. These systems suffer from inadequate
integration, a lack of flexibility and capability, and high ownership costs. In
this chapter, we examined how important automation and integration are to the
production of semiconductors. There is discussion of some fab automation factors.
The tool, cell, and fab automation for semiconductor manufacturing is
described, along With the three-level hierarchical distributed automation
architecture. Numerous semiconductor materials and technologies are well suited
for applications demanding 100 GHz and 100 Gb/s.
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